Gasonics A95-053-02 Lamp Illuminator Power Box Component
Product manual:
Product Overview:
Gasonics A95-053-02 is a power box component for lighting fixtures used in semiconductor devices,
Mainly responsible for providing stable power supply for lighting units in the system, such as ultraviolet lamps or xenon lamps,
Ensure the normal operation of the lighting system during the manufacturing process.
It is an important auxiliary module of Gasonics/Novellus series plasma processing equipment.
Technical parameters (typical):
Power type: Industrial grade lighting power supply
Input voltage: Supported by device model, usually AC 110V/220V
Output characteristics: Stable DC/pulse power supply, used to drive UV/xenon lamps
Adaptation system: Gasonics Aura 1000, Aura 2000, L3510 and other models
Structural form: Box metal package, including internal voltage regulation and control circuit
Connection method: Multi pin interface for communication and power supply with the main control system
Application scenarios:
Plasma Asher Process
Provide light source support for removing photoresist or process residues.
Mask/wafer surface inspection
Provide uniform high brightness illumination to assist the detection system in observing minor defects.
Semiconductor equipment lighting system
Drive the light source unit to ensure stable and reliable lighting in the equipment cabin.
Gasonics plasma stripping system
As an original or replacement accessory for old models of Gasonics brand equipment.
Product advantages:
Provide stable and reliable power output for the light source unit
Easy to install and maintain, easy to integrate into the original factory system
Good compatibility with multiple old models of Gasonics equipment
Improve the illumination accuracy and reliability of plasma cleaning and inspection processes
Product details picture:
A95-053-02
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