KLA Tencor 0252671-000 amplifier module
Product manual:
Product Name: KLA Tencor 0252671-000
Module function: Four channel photomultiplier tube signal amplifier (MUXAMP 4-PMT)
1、 Application Fields
Semiconductor wafer testing equipment
Surface defect detection equipment for KLA Tencor (such as Surfscan and SP series),
Amplify the weak light signals collected by multiple PMTs to detect micro defects such as particles, scratches, and contamination on the wafer surface.
Optical particle detection system
In optical particle counting or pollution monitoring systems, weak light signals generated by laser scattering are collected,
Determine the degree of air or equipment surface particle pollution.
Photomultiplier Tube Signal Processing System
Used to enhance the signal strength of multiple PMT outputs simultaneously,
Realize signal normalization and high-sensitivity recognition to improve signal-to-noise ratio.
Plasma or weak light source analysis equipment
Applied in the field of measuring extremely weak light signals,
For example, plasma monitoring, photoluminescence, laser-induced scattering analysis and other scenarios.
Multi channel synchronous detection system
Suitable for detection devices that require parallel reading of multiple optical channels,
Such as rapid defect recognition, parallel particle counting, multi beam analysis, etc.
2、 Typical features
Supports 4 PMT signal inputs
High gain, low-noise amplification
Multi channel synchronous output
Modular design facilitates system integration
Commonly used in optical, detection, and metrology equipment
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