KLA Tencor 0348368-002 Combination Interface Board
Product manual:
The KLA Tencor 0348368-002 Combo Interface Board is a circuit board specifically designed for signal integration and connection functions in semiconductor manufacturing equipment.
According to the company's product architecture and the purpose of similar interface modules, its main product application areas are as follows:
1、 Product Function Overview
The 0348368-002 interface board has multiple electrical interface standards,
Used to establish channels for data communication, control signals, analog/digital input/output, etc. between different functional modules within the device.
Commonly used to connect the following components:
Laser/Optical Detection System
Electron beam scanning module
Signal Processing Unit
Scan platform controller
Probe control module
2、 Typical application areas
Wafer defect detection system
In KLA's Surfscan series, eSxx series, and 236x series,
The interface board is used to connect the scanning platform with the defect recognition processing system, achieving synchronous control and image data transmission.
CD-SEM morphology measurement system
Used to achieve high-speed communication between the electronic beam scanning probe controller and the host data processing system,
Assist in achieving precise measurement functions such as line width and edge roughness.
Automated Shadow Detection Equipment
In the post lithography detection system, the interface board serves as a light source control, reflection acquisition
Control and feedback bridge for mobile platform positioning system.
Wafer transfer and loading unit
During the process of wafer loading, calibration, and alignment,
The interface board controls various sensors and actuators to achieve automatic handling and status detection.
Multi functional detection/analysis platform
A system architecture that adapts to multiple sensor inputs and multiple signal outputs,
Support high-precision, multi-channel parallel processing requirements.
Product details picture:
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