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KLA Tencor 710-659274-00 Single Axis Controller

KLA Tencor 710-659274-00 Single Axis Controller

Product manual:

The KLA Tencor 710-659274-00 single axis controller is a high-performance control module designed specifically for precision motion control, widely used in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:

1、 Semiconductor equipment
Wafer Inspection System

Used for driving and controlling the single axis precision movement of wafer stages, achieving high-resolution scanning and positioning.

For example, in Surfscan, e-beam, or optical detection systems, ensure precise line scanning or spot checking positions.

Photolithography machine

Control the linear movement of the mask or wafer platform to achieve sub micron level alignment.

Collaborate with the laser interferometer system to ensure stable trajectory and synchronized feedback.

Metrology Tools

Used to control the single axis sliding of probes, lasers or cameras, achieving precise measurement of parameters such as thickness, step height, CD, etc.

Support closed-loop control and fast response mechanism.

2、 Precision machining and nanoscale motion platform
Used in nanoimprint, precision etching, ion implantation and other equipment to drive moving components and achieve high-speed and low error processing.

Control the single axis slide table for sample handling and process flow switching.

3、 Microscopic imaging and defect analysis
Used for controlling the X/Y/Z uniaxial movement of sample trays in electron microscopy systems (such as SEM or TEM) to obtain multi angle imaging.

Support precise re examination and automatic repositioning of defect areas.

4、 Other high-end automation equipment
LCD/FPD manufacturing: used for single axis glass panel transportation and alignment in large-sized panel manufacturing.

MEMS detection platform: Control the movement of micro scale platforms to achieve dynamic testing of structure or performance.

Micro assembly system: assists in the positioning and installation of small components.