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Novellus Systems 02-00315-01 Interface Module

Novellus Systems 02-00315-01 Interface Module

Product manual:

The Novellus Systems 02-00315-01 interface module is a critical electronic component used in semiconductor manufacturing equipment,
Mainly used for signal and data transmission between control systems and external devices.
This module is typically used in Novellus deposition equipment such as PECVD, SACVD, HDPCVD, or metal deposition systems, serving as a "bridge".

1、 Basic Information
Product Name: Interface Module

Model: 02-00315-01

Manufacturer: Novellus Systems Inc. (acquired by Lam Research)

Purpose: To connect the main control system with peripheral sensors, actuators, communication buses, etc., and complete I/O mapping and signal processing.

2、 Functional Features
I/O interface management: Provides digital/analog input/output channels, allowing device controllers to communicate with peripheral devices.

Signal isolation: Built in isolation protection to prevent static electricity or electrical interference from affecting the core control logic.

Modular design: supports hot swapping or easy replacement, suitable for multiple Novellus process platforms.

Data relay: may act as an intermediate node to transmit commands and feedback between PLCs, computers, sensors, and actuators.

3、 Typical application devices
This type of interface module is commonly used in the following device series of Novellus Systems:

Concept One/Two/Tree series: widely used in CVD processes.

Speed series system: used for high-throughput deposition processes.

ALTUS series: Atomic Layer Deposition (ALD) equipment.