Details
853-064887-061 RF Matcher
Product manual:
853-064887-061 is an RF Matching Unit mainly used in RF systems to match the load impedance with the RF power supply, in order to improve power transmission efficiency and protect the stable operation of the RF source. This type of equipment is very common in plasma, semiconductor manufacturing, and high-frequency industrial applications.
Basic functions
impedance matching
Automatically or semi automatically adjust the matching network to match the load impedance with the output impedance of the RF power supply.
Minimize reflected power and improve energy utilization efficiency.
RF power optimization
Ensure stable transmission of RF power to the load end.
Reduce power loss and system fluctuations caused by mismatches.
RF source protection
Reduce the impact of reflected power on the RF generator when the load changes or is abnormal.
Helps to extend the service life of RF power supplies and related devices.
Industrial grade reliability
Suitable for continuous operation environment, with stable structure and strong anti-interference ability.
Can work stably for a long time under high power and high frequency conditions.
Typical application scenarios
Semiconductor manufacturing equipment (etching, deposition, plasma processes)
Vacuum coating and plasma cleaning equipment
High frequency heating and plasma processing system
Other industrial systems that require stable RF power transmission
853-064887-061 Product details picture:

853-064887-061 product video
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