AE APEX 3013 Generator

Brand:AE
Model:APEX3013
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AE APEX 3013 Generator

Product manual:

AE APEX 3013 is an industrial grade generator designed and manufactured by Advanced Energy,
Mainly used for radio frequency (RF) power applications, widely used in fields such as semiconductor manufacturing, plasma processes, photovoltaics, and precision material processing.
This generator has high power density, precise power control, and good modular design, suitable for various complex industrial needs.

Main technical parameters:
Output frequency: 13.56 MHz, commonly used in plasma processes.

Output power: up to 3 kW, suitable for medium to high power applications.

Input voltage: 208 VAC three-phase power supply is used to ensure stable operation of the equipment.

Cooling method: Adopting a water cooling system to provide efficient heat dissipation, suitable for long-term operation.

Size: Meets the 3U standard rack size, weighs approximately 19 kilograms, and is easy to install and maintain.

Core advantages:
High power density: The compact design provides high power output and saves space.

Accurate power control: capable of providing stable power output, ensuring reliability in complex processes.

Modular design: The system can be expanded or upgraded according to requirements, and maintenance is simple.

Wide range of communication interface support: including RS-232, Ethernet, DeviceNet, and Profibus,
Facilitate integration with other control systems.

Application areas:
Semiconductor manufacturing: providing stable RF power during processes such as plasma etching and chemical vapor deposition (CVD).

Photovoltaic industry: used for thin film deposition of solar cells.

Precision material processing: used for surface modification of materials, plasma cleaning and other applications.

Research laboratory: provides stable radio frequency energy for plasma related research.