AMAT 0010-02657 Cooling Chamber Component

Product manual:

AMAT 0010-02657 Cooling Chamber Component
Product Overview

AMAT (Applied Materials) 0010-02657 cooling chamber component is a core module used for thermal management and temperature control in semiconductor manufacturing equipment.
It mainly uses liquid or gas circulation systems to circulate key components of the equipment, such as reaction chambers, heaters, power modules, control boxes, etc
The generated heat is effectively carried away to maintain the operating temperature of the equipment within the allowable range of the process, ensuring process accuracy and equipment stability.
Cooling chamber components are particularly important in high-power processes such as deposition, etching, and ion implantation.

Technical parameters (typical direction, specific data should refer to the original factory information)

Cooling method: liquid circulation or air cooling (depending on the specific equipment)

Applicable power range: Heat dissipation for high-power process modules

Temperature control: supports precise temperature control to ensure stable process temperature

Interface: Fluid inlet and outlet interface, temperature sensor interface

Material and environmental adaptability: corrosion-resistant and high-temperature resistant materials, suitable for clean room environments

Modular design: easy to install, maintain, and replace

Application scenarios

Deposition process (CVD/PVD/ALD)

Cool the reaction chamber and heater module to maintain uniform chamber temperature and ensure consistent film deposition

Avoid film defects or equipment damage caused by overheating

Etching process equipment

Cooling RF power module, power module, and cavity to ensure etching accuracy and plasma stability

Ion implantation system

Control the temperature of the ion source and scanning system to maintain consistency in dose and energy

Avoid temperature rise affecting device processing accuracy

Control box and chassis control box

Cooling electronic modules and power modules, extending module lifespan, and improving system reliability

R&D and laboratory platform

Provide a stable temperature control environment, support process development and experimental verification

AMAT 0010-02657 Product details picture:

0010-02657

AMAT 0010-02657 product video

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