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AMAT 0010-70415 Pneumatic Box

Brand: AMAT 
Model:0010-70415
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT 0010-70415 Pneumatic Box

Product manual:

AMAT 0010-70415 Pneumatic Box
Product Overview

AMAT (Applied Materials) 0010-70415 pneumatic box is a pneumatic control and distribution unit used in semiconductor manufacturing equipment. It integrates pneumatic valves, pipeline interfaces, regulators, and actuators to provide stable compressed gas supply and control for various sub modules within the equipment, such as pneumatic interlocks, pneumatic valves, pumps, and mechanical action components. The pneumatic box ensures the safe and reliable operation of the equipment's pneumatic system, while supporting process operation, maintenance, and automation control.

Technical parameters (typical direction, specific data should refer to the original factory information)

Gas source type: Compressed air or inert gas

Control mode: Pneumatic or electrically controlled pneumatic valve drive

Interface: Multi channel gas output interface, capable of connecting pneumatic execution modules

Internal components: pneumatic valve, regulator, filter, sensor interface

Installation method: Modular design, can be integrated into the equipment chassis or control box

Environmental adaptability: resistant to high pressure and vibration, suitable for clean rooms and industrial environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide pneumatic operations required for reaction chambers or process modules

Support precise control of gas valves and chamber pressure regulation

Etching process equipment

Control the action of pneumatic valves and chamber switches

Ensure stable etching process parameters

Interlocking system and safety control

Cooperate with the interlock module to achieve safe control of door locks and valves

Prevent equipment from operating in an unsafe state

Control box and chassis system

As the core allocation unit of the pneumatic system

Provide stable pneumatic drive for each submodule

Factory Automation and Maintenance

Support remote pneumatic control and equipment status monitoring

Improve equipment operation safety and maintenance efficiency

AMAT 0010-70415 Product details picture:

0010-70415

AMAT 0010-70415  product video

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