AMAT 0010-70415 Pneumatic Box
Brand: AMAT
Model:0010-70415
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT 0010-70415 Pneumatic Box
Product manual:
AMAT 0010-70415 Pneumatic Box
Product Overview
AMAT (Applied Materials) 0010-70415 pneumatic box is a pneumatic control and distribution unit used in semiconductor manufacturing equipment. It integrates pneumatic valves, pipeline interfaces, regulators, and actuators to provide stable compressed gas supply and control for various sub modules within the equipment, such as pneumatic interlocks, pneumatic valves, pumps, and mechanical action components. The pneumatic box ensures the safe and reliable operation of the equipment's pneumatic system, while supporting process operation, maintenance, and automation control.
Technical parameters (typical direction, specific data should refer to the original factory information)
Gas source type: Compressed air or inert gas
Control mode: Pneumatic or electrically controlled pneumatic valve drive
Interface: Multi channel gas output interface, capable of connecting pneumatic execution modules
Internal components: pneumatic valve, regulator, filter, sensor interface
Installation method: Modular design, can be integrated into the equipment chassis or control box
Environmental adaptability: resistant to high pressure and vibration, suitable for clean rooms and industrial environments
Application scenarios
Deposition process (CVD/PVD/ALD)
Provide pneumatic operations required for reaction chambers or process modules
Support precise control of gas valves and chamber pressure regulation
Etching process equipment
Control the action of pneumatic valves and chamber switches
Ensure stable etching process parameters
Interlocking system and safety control
Cooperate with the interlock module to achieve safe control of door locks and valves
Prevent equipment from operating in an unsafe state
Control box and chassis system
As the core allocation unit of the pneumatic system
Provide stable pneumatic drive for each submodule
Factory Automation and Maintenance
Support remote pneumatic control and equipment status monitoring
Improve equipment operation safety and maintenance efficiency
AMAT 0010-70415 Product details picture:

0010-70415
AMAT 0010-70415 product video
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