AMAT 0015-09091 Phase Angle Converter

Product manual:

AMAT 0015-09091 Phase Angle Converter
Product Overview

AMAT (Applied Materials) 0015-09091 phase angle converter is an electronic signal processing module mainly used for phase adjustment and synchronization processing of AC signals or process related signals in semiconductor equipment. It can convert the phase of the input signal into the reference phase required by the device, thereby ensuring synchronous operation between multiple devices or process subsystems. This module is widely used in plasma generators, RF power control, or other process systems that require precise phase control.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input signal type: AC signal or specific process reference signal

Phase control range: adjustable from 0 ° to 360 °, supporting continuous or discrete adjustment

Output signal: synchronized signal after phase adjustment with the input signal

Accuracy: High precision phase conversion, with errors below a few degrees

Work environment: Suitable for semiconductor equipment with high cleanliness and low noise electromagnetic environment

Interface: Compatible with AMAT process equipment control system

Application scenarios

Plasma generator control

Adjust the phase of the RF signal to ensure uniform plasma power distribution and optimize the etching or deposition process.

RF power synchronization

Phase matching between multiple RF modules or power sources ensures coordinated and consistent power output.

Deposition process (CVD/PVD)

Optimizing film uniformity through phase control in multi-source sedimentation or alternating processes.

etching process

By adjusting the phase to control the plasma profile and etching rate, fine pattern processing can be achieved.

Synchronization of process equipment signals

Signal coordination between equipment or submodules ensures that multiple systems start or stop simultaneously, avoiding process interference.

Experimental and R&D platform

Support the adjustment and validation of phase sensitive parameters in the development of new processes.

AMAT 0015-09091 Product details picture:

0015-09091

AMAT 0015-09091 product video

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