AMAT 0041-61152 Controller

Product manual:

AMAT 0041-61152 Controller
Product Overview

The AMAT (Applied Materials) 0041-61152 controller is one of the core electronic control units used in semiconductor manufacturing equipment, mainly for real-time monitoring of equipment operating parameters, logical operations, and process execution control. It is equivalent to the "brain" of the device, coordinating the operation of gas systems, vacuum systems, heating units, and other key sub modules through signal acquisition and feedback, thereby ensuring the stability and safety of the process.

Technical parameters (typical direction, specific data should refer to the original factory information)

Processing core: Industrial grade embedded processor, supporting real-time computation and multitasking control

Interface: Multi channel digital/analog I/O, supporting high-speed data acquisition and signal output

Communication capability: Compatible with multiple buses/protocols, able to interact with the main control system or other modules

Safety features: Built in fault diagnosis, interlock logic, and alarm mechanism

Adaptation platform: can be used for various equipment such as AMAT deposition, etching, ion implantation, etc

Application scenarios

Sedimentation equipment (CVD/PVD/ALD)

Manage key process parameters such as temperature, gas flow rate, and plasma power in the reaction chamber.

Ensure the uniformity and stability of thin film deposition.

Etching process equipment

Real time monitoring of gas ratio, vacuum degree, RF power, and dynamic adjustment of etching rate.

Provide contour control and process window optimization.

Ion implantation equipment

Control ion source parameters (energy, dose, beam uniformity) to improve device electrical consistency.

Gas and vacuum control system

Coordinate the operation of valves, flow controllers, and vacuum pumps to maintain a stable chamber environment.

Safety and Interlocking Management

When abnormal conditions such as gas leakage, overpressure, and overheating are detected, interlock protection is immediately triggered.

Ensure the safety of equipment and personnel.

R&D and laboratory processes

Parameter control and data recording for multivariate experiments in process development and testing platforms.

AMAT 0041-61152 Product details picture:

0041-61152

AMAT 0041-61152 product video

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