AMAT 0090-10396 RF Filter Box
Brand: AMAT
Model:0090-10396
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT 0090-10396 RF Filter Box
Product manual:
AMAT 0090-10396 RF Filter Box
Product Overview
AMAT (Applied Materials) 0090-10396 RF Filter Box
It is an electronic module specifically designed for semiconductor manufacturing equipment, mainly used for filtering and adjusting radio frequency (RF) signals.
It can suppress unnecessary frequency interference, ensure the purity and stable output of RF power, thereby improving the performance of plasma sources or RF drive modules.
This module is typically used in process equipment that requires RF control, such as deposition and etching.
Technical parameters (typical direction, specific data should refer to the original factory information)
Filter type: RF signal bandpass/low-pass/high pass filtering, reducing noise and interference
Working frequency range: RF signal specifications according to process requirements
Interface: Input/output RF signal port, compatible with AMAT RF control module
Signal characteristics: low insertion loss, high isolation, ensuring signal quality
Environmental adaptability: high cleanliness, low electromagnetic interference environment
Structure: Modular design for easy integration and maintenance of equipment
Application scenarios
Deposition process (PVD/CVD/ALD)
Filter the RF power output to ensure stable plasma power
Improve the uniformity and process repeatability of thin film deposition
Etching process equipment
Suppress stray frequencies in RF signals to avoid interference with the cavity plasma
Accurate control of etching rate and process profile
Plasma source and RF drive system
Purification and matching of RF signals to improve power transmission efficiency
Ensure multi module RF synchronization and stability
Equipment maintenance and upgrade
Replaceable modular filter box, supporting equipment performance optimization and signal debugging
AMAT 0090-10396 Product details picture:

0090-10396
AMAT 0090-10396 product video
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