AMAT 0100-01341 power module

Product manual:

AMAT 0100-01341 power module
Product Overview

The AMAT (Applied Materials) 0100-01341 power module is a critical electrical power supply unit used in semiconductor manufacturing equipment to provide stable and reliable DC or AC power to various functional modules inside the equipment. It is usually integrated into the control box, chassis control box, or independent power cabinet, providing power to key sub modules such as heaters, pumps, pneumatic valves, RF modules, controllers, etc., ensuring stable equipment operation and process accuracy.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power supply

Output type: DC/AC power output, multiple adjustable channels

Rated power: meets the requirements of high-power process modules

Protection function: overcurrent, overvoltage, short circuit protection

Interface: Connect with the control system and interlock system to achieve remote monitoring

Installation method: Modular design for easy integration, maintenance, and replacement

Environmental adaptability: high temperature resistance, vibration resistance, suitable for clean room process environment

Application scenarios

Controller and chassis control box power supply

Provide stable power supply to the controller PCB、 Interlocking module

Ensure the normal operation of internal electronic modules

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Support temperature and flow control during thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure consistent injection dose and uniformity

Factory Automation and Safety Systems

Cooperate with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT 0100-01341 Product details picture:

0100-01341

AMAT 0100-01341 product video

More related products:

AO2000 LS25 gas analyzer
LAM 810-072903-014 Robot Interface Board
SDCS-PIN-4B power board

More product recommendations:

VMIVME-7807 Gas turbine module
CI522A 3BSE018283R1 Numerical control system
CI534V02 3BSE010700R1 Control module