AMAT 0100-09026 Communication Module

Product manual:

AMAT 0100-09026 Communication Module
Product Overview

AMAT (Applied Materials) 0100-09026 communication module is a data transmission and network interface module used in semiconductor manufacturing equipment. It is responsible for data communication between the internal controllers, sensors, execution modules, and upper control systems (such as factory automation systems or monitoring systems) of the equipment, ensuring real-time exchange of process parameters, equipment status, and monitoring information. This module is an important component for implementing device networking, remote monitoring, and automated management.

Technical parameters (typical direction, specific data should refer to the original factory information)

Communication type: Industrial standard network protocol (such as Ethernet/IP, RS-232/485, etc.)

Data rate: Suitable for real-time process data transmission requirements

Interface: Multi channel input/output interface, supporting connection between internal modules of the device and the upper system

Control method: Data exchange and management through the controller or upper system

Installation method: Modular design, easy to integrate into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature ranges

Application scenarios

Deposition process (CVD/PVD/ALD)

Realize data communication between heaters, pumps, gas valves, sensors, and controllers

Support real-time monitoring and adjustment of process parameters

Etching process equipment

Connect the RF module, flow control module, and pressure sensor

Provide a stable data path to ensure the accuracy of the etching process

Ion implantation system

Data transmission ion source, scanning system, and beam monitoring module

Ensure controllable injection dose and uniformity

Control box and chassis control box

As the core node for internal network communication of the device

Support coordinated operation and remote monitoring between modules

Factory Automation and Safety Management

Integrate with the upper system, interlock system, and monitoring platform

Implement remote operation, data recording, and abnormal alarm

AMAT 0100-09026 Product details picture:

0100-09026

AMAT 0100-09026 product video

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