AMAT 0190-18266 Pneumatic Locking Component

Brand: AMAT
Model:0190-18266
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT 0190-18266 Pneumatic Locking Component

Product manual:

AMAT 0190-18266 Pneumatic Locking Component
Product Overview

AMAT (Applied Materials) 0190-1826 Pneumatic Locking Assembly is a mechanical positioning and fixing module used in semiconductor manufacturing equipment, which achieves rapid locking or releasing of equipment components through pneumatic drive. It is usually used to fix reaction chambers, process modules, or movable trays, ensuring the stability and precise positioning of components during the process, while supporting quick disassembly and maintenance.

Technical parameters (typical direction, specific data should refer to the original factory information)

Drive mode: Pneumatic actuator

Locking force: the mechanical force required to fix the equipment components

Journey: According to the module design, it can achieve complete locking and releasing

Interface: Pneumatic pipeline interface, compatible with equipment control system

Installation method: Modular, easy to integrate into equipment chassis or cavity modules

Environmental adaptability: Suitable for semiconductor cleanrooms and high-temperature, vacuum process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Lock the cavity or process module to ensure the accuracy of the process position during the thin film deposition process

Support quick disassembly and assembly for equipment maintenance or module replacement

Etching process equipment