AMAT 3930-00092 Controller

Product manual:

AMAT 3930-00092 Controller
Product Overview

The AMAT (Applied Materials) 3930-00092 controller is a core electronic control unit used in semiconductor manufacturing equipment. It is used to coordinate the operation of various sub modules within the equipment, including heaters, pumps, pneumatic valves, RF modules, sensors, etc., to achieve precise control of process parameters and real-time monitoring of equipment status. This controller is usually installed in the control box or chassis and is a key module for equipment automation operation and process stability.

Technical parameters (typical direction, specific data should refer to the original factory information)

Processing capability: Supports parallel control of multiple modules

Interface type: digital/analog input/output interface, compatible with various sub modules of AMAT

Communication capability: Supports data communication with the upper control system and interlock module

Control functions: logic operation, process adjustment, status monitoring

Installation method: Modular design, can be integrated into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Control heater temperature, gas flow rate, and pump pressure

Ensure the uniformity of thin film deposition and process repeatability

Etching process equipment

Control RF power module, etching gas flow rate, and chamber pressure

Improve etching accuracy and process stability

Ion implantation system

Control ion source, scanning system, and beam monitoring module

Ensure injection dose and uniformity

Control box and chassis control box

As the core control unit of each module inside the device

Cooperate with power modules, interlock modules, PCBs, etc. to achieve safe and reliable operation of equipment

Factory Automation and Remote Monitoring

Linkage with the upper system and interlocking system to achieve equipment status monitoring, data collection, and abnormal alarm

AMAT 3930-00092 Product details picture:

3930-00092

AMAT 3930-00092  product video

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