AMAT Applied Materials 0010-00557 Heat Exchanger

Brand: AMAT Applied Materials
Model: 0010-00557
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0010-00557 Heat Exchanger

Product manual:

Product application areas
1. Chemical mechanical polishing (CMP) system

Heat exchangers are mainly used for temperature control of CMP process liquids, such as polishing liquids.

The CMP process is highly sensitive to temperature, and changes in liquid temperature directly affect material removal rate (MRR) and polishing uniformity.

Maintain stable temperature through a heat exchanger to ensure surface flatness and process consistency of silicon wafers.

2. Cooling of semiconductor manufacturing equipment

Used for thermal management of key internal components of equipment, such as motor drive modules, pumps, control valves, or polishing heads.

Prevent local overheating from causing process deviations or equipment damage.

Can be used in conjunction with circulating water systems, coolant systems, or constant temperature liquid systems.

3. Precision gas or liquid management system

In semiconductor equipment, some gas or liquid circuits require stable temperature conditions to maintain flow accuracy and reaction consistency.

The heat exchanger adjusts the temperature of the circuit through thermal balance to improve system stability.

4. Laboratory and R&D process

In material research and development or semiconductor process experiments, heat exchangers can control the liquid temperature of small-scale experimental devices to ensure reliable experimental data.

Support rapid change of process conditions, suitable for testing multiple process parameters.

5. Temperature safety protection for production lines

Heat exchangers can prevent liquids or gases from overheating, avoiding equipment failures or safety accidents.

Improve the reliability and capacity stability of the entire production line.

summary

The AMAT 0010-00557 heat exchanger is a core auxiliary component in semiconductor manufacturing equipment, and its application is not limited to CMP systems, but also covers multiple fields such as precision liquid and gas management, equipment cooling, and safety protection. By stabilizing the temperature, it ensures controllable process parameters and improves product quality and equipment lifespan.