AMAT Applied Materials 0010-08670 Top Cover
Brand: AMAT Applied Materials
Model:0010-08670
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT Applied Materials 0010-08670 Top Cover
Product manual:
AMAT Applied Materials 0010-08670 Top Cover
Product Overview
0010-08670 is a top cover/Chamber Lid component in AMAT semiconductor equipment, mainly used to seal process chambers or critical modules, ensuring safe operation of the equipment under vacuum or controlled atmosphere conditions. The top cover not only provides mechanical protection, but also typically integrates sealing, interface, and monitoring functions, making it an important component for ensuring process stability and equipment safety.
Technical functions and features
Sealing and Vacuum Maintenance
The top cover is equipped with high-performance seals to ensure the vacuum integrity of the cavity or process module.
Prevent external air or impurities from entering and ensure a pure process environment.
mechanical protection
Protect the wafers and precision components inside the cavity from mechanical damage.
The structure is sturdy and can withstand vacuum differences and equipment operation vibrations.
Interface and sensor installation
The top cover is usually designed with interfaces that can accommodate gas pipelines, electrical connections, or sensors.
Support temperature, pressure, or position monitoring to achieve closed-loop process control.
Security interlock design
The top cover is linked with the device controller to prevent the device from starting when it is not fully closed or sealed abnormally.
Protect the safety of wafers and equipment to avoid damage caused by misoperation.
modular design
The structure is detachable and replaceable, making it easy to maintain and upgrade the equipment.
Designed to meet semiconductor cleanroom standards, easy to clean and maintain.
AMAT Applied Materials 0010-08670 Product details picture:

0010-08670
AMAT Applied Materials 0010-08670 product video
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