AMAT Applied Materials 0010-09035 throttle valve

Brand: AMAT Applied Materials
Model:0010-09035
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0010-09035 throttle valve

Product manual:

Product Overview

AMAT 0010-09035 throttle valve is a key fluid control component in Applied Materials semiconductor equipment, used to regulate the flow and pressure of process gases or vacuum systems. This valve can accurately adjust its opening according to the controller signal, achieving continuous flow control and optimizing the process conditions of deposition (CVD/PVD), etching (Etch) or other vacuum processes. It is an important component to ensure process stability and equipment safety.

Technical parameters (typical features)

Type: Throttle Valve

Function: Adjust gas or vacuum flow and pressure to achieve precise control

Control mode: Electrical or pneumatic control, can achieve closed-loop regulation with the controller

Interface type: standard flange or pipeline interface, suitable for process gas or vacuum systems

Work environment: cleanroom compatible, corrosion-resistant, high temperature resistant

Applicable media: process gases (such as N ₂, Ar, SiH ₄, etc.) and vacuum system gases

Compatible devices: Various deposition, etching, and vacuum process equipment from Applied Materials

Application scenarios

Process flow regulation

Accurately control the flow rate of process gas or vacuum system to ensure process stability.

vacuum control