AMAT Applied Materials 0010-09181 DC Power Supply Unit

Product manual:

AMAT Applied Materials 0010-09181 DC Power Supply Unit
Product Overview

0010-09181 is a DC Power Supply Unit in AMAT semiconductor equipment, used to provide stable DC voltage and current to process equipment or critical modules. It is commonly used in plasma power supplies, electrostatic chucks, heaters, valve drives, and other semiconductor process units that require precise DC voltage to ensure safe and reliable operation of equipment under high-precision process conditions.

Technical functions and features

Stable DC output

Provide high-precision adjustable DC voltage and current to meet process requirements.

The output voltage fluctuation is small, ensuring the stability of sensitive process modules.

Multi channel output and control

Support simultaneous power supply to multiple process subsystems or load modules.

It can be combined with a controller to achieve remote adjustment and monitoring.

protection function

Built in overcurrent, overvoltage, and short-circuit protection mechanisms to prevent equipment damage.

Interlock with the interlocking system to automatically shut down in case of abnormal conditions.

modular design

Can be quickly installed, disassembled, and replaced for easy maintenance.

Design a high cleanliness and high temperature environment suitable for semiconductor equipment.

Application field

Plasma process equipment

Provide a DC bias voltage for the plasma source to control ion energy and bombardment intensity.

Electrostatic Chuck (ESC) System

Provide DC power for wafer adsorption to ensure stable fixation of the wafer during the process.

Heating and temperature control unit

Provide DC power supply for thermal ion heaters or resistance heaters to ensure temperature control accuracy.

Valve and actuator drive

Provide stable DC voltage for gas or liquid control valves, electromagnetic actuators, etc., to ensure reliable flow and pressure control.

Automated wafer handling

Provide reliable power supply for DC motors in mechanical lifting, transmission, or Loadlock systems.

AMAT Applied Materials 0010-09181 Product details picture:

0010-09181

AMAT Applied Materials 0010-09181 product video

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