AMAT Applied Materials 0010-10371 Sensor Box

Brand: AMAT Applied Materials
Model:0010-10371
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0010-10371 Sensor Box

Product manual:

Product Overview

The AMAT 0010-10371 sensor box is a key detection module in Applied Materials semiconductor equipment, used for centralized installation and management of various process sensors. This module can collect various process parameters such as temperature, pressure, flow rate, humidity, etc., and transmit signals to the controller or digital control system through an integrated interface, achieving real-time monitoring and precise adjustment of the semiconductor equipment process environment. The sensor box is an important component in ensuring equipment process stability and improving yield.

Technical parameters (typical features)

Type: Sensor Box

Function: Centralized installation of sensors, collection of process parameters, signal transmission

Supporting sensor types: temperature sensor, pressure sensor, flow meter, humidity sensor, etc

Interface form: Multi channel electrical interface, supporting analog and digital signal transmission

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, heat treatment equipment

Signal processing: can achieve closed-loop control with controllers or digital control systems

Application scenarios

Process parameter monitoring

Real time collection of temperature, pressure, flow rate and other parameters of the chamber and process environment.

Data transmission and control