AMAT Applied Materials 0010-13143 RF Module Components

Brand: AMAT Applied Materials
Model:0010-13143
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0010-13143 RF Module Components

Product manual:

1、 Product Overview

AMAT Applied Materials 0010-13143 RF module component is a critical RF power control unit used in semiconductor equipment.
It is mainly responsible for generating, regulating, and transmitting RF power to support plasma generation and precision machining during the manufacturing process.
This module usually works in conjunction with the RF matching module, interlock module, and controller, and is an important component for the stable operation and process accuracy guarantee of the equipment RF system.

2、 Technical parameters (speculated and organized)

Component type: RF Module Assembly

Functional positioning: RF power generation, regulation, and control

Interface types: RF interface, control signal interface, and power interface

Power output: Provide specified RF power (such as hundreds of watts to kilowatts) according to different applications

Installation method: Modular design, can be installed in the RF unit or control chassis

Protection function: overcurrent, overvoltage, short circuit, and over temperature protection

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanrooms and high electromagnetic interference environments

Version revision: There may be different versions (Rev A/B, etc.) with differences in power output or interface types

3、 Application scenarios

Plasma process support: Generate the required RF power for semiconductor processes

RF power regulation: in conjunction with RF matching and interlocking modules, achieves precise power control