AMAT Applied Materials 0010-17814 Endpoint Detector

Product manual:

AMAT Applied Materials 0010-17814 Endpoint Detector
Product Overview

0010-17814 is an endpoint detector module in AMAT semiconductor equipment, used for real-time detection of the completion status (endpoints) of material deposition, etching, or other processes during semiconductor processing. This module monitors the process progress through optical, electrical, or other sensing methods, providing precise process completion signals to the controller to ensure wafer processing quality and process consistency.

Technical functions and features

Real time process monitoring

Accurately detect the endpoint position of thin film deposition, etching, or cleaning processes.

Provide high-sensitivity signals to achieve timely judgment of process endpoints.

Closed loop process control

Feedback the detection signal to the controller to achieve automatic stopping or switching of process steps.

Support multi-channel signal acquisition to meet complex process requirements.

Interface and compatibility

With the controller PCB、 Connect the gauge controller and servo module to achieve data transmission and process linkage.

Modular design, easy to upgrade and maintain.

High reliability design

Adapt to high cleanliness and high temperature environments for semiconductor equipment.

It has anti-interference, long-term stable operation, and abnormal alarm functions.

Application field

Deposition process (CVD/PVD/ALD)

Monitor the endpoint of thin film deposition to ensure consistency and uniformity of film thickness.

etching process

Accurately determine the completion time of etching, prevent over etching or under etching, and ensure graphic accuracy.

Cleaning and surface treatment process

Check the completion status of the manufacturing process to ensure that the wafer surface treatment meets the requirements.

Automated semiconductor production line

Collaborate with controllers and process modules to achieve automated endpoint detection and closed-loop process control.

AMAT Applied Materials 0010-17814 Product details picture:

0010-17814

AMAT Applied Materials 0010-17814  product video

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