AMAT Applied Materials 0010-19188 Cooling Lift
Brand: AMAT Applied Materials
Model:0010-19188
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT Applied Materials 0010-19188 Cooling Lift
Product manual:
AMAT Applied Materials 0010-19188 Cooling Lift
Product Overview
0010-19188 is a Cooling Elevator/Wafer Lift Cooling Unit in AMAT semiconductor process equipment. It is mainly used for safe and uniform cooling and handling of wafers or process components after high-temperature processes. This module integrates mechanical lifting and cooling control functions to ensure temperature control of the wafer during transfer or entry into the next process step, avoiding thermal stress or damage.
Technical functions and features
Wafer or component cooling
Through cooling plates or coolant circulation systems, achieve rapid and uniform cooling of wafers.
Support temperature monitoring and closed-loop control to ensure that the cooling curve meets the process requirements.
Lift and transport function
The mechanical lifting device can safely transfer wafers or carriers to designated positions.
Integrate with robot interfaces or Loadlock systems to achieve automated handling.
Security interlock design
The lifting process is interlocked with the cabin door, vacuum pump, gas supply and other systems to prevent misoperation.
Automatically stop operation in case of abnormal temperature or mechanical failure to protect wafers and equipment.
Modularity and easy maintenance
Modular design allows for quick disassembly, replacement, or maintenance, reducing downtime.
Compact structure, suitable for semiconductor cleanroom environment.
Application field
CVD/PVD process equipment
After the thin film deposition is completed, provide uniform cooling of the wafer to avoid the generation of thermal stress.
Combined with wafer transfer system to achieve continuous process operation.
Etching equipment
After the high-temperature etching is completed, the wafer is cooled to prepare for subsequent processes such as photolithography or cleaning.
Wafer Transfer and Loadlock System
The elevator collaborates with Loadlock doors and handling robots to achieve safe temperature controlled handling of wafers from vacuum chambers to atmospheric chambers.
Automatic production line
Support batch processing of wafers, reduce manual intervention, improve process consistency and production capacity.
AMAT Applied Materials 0010-19188 Product details picture:

0010-19188
AMAT Applied Materials 0010-19188 product video
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