AMAT Applied Materials 0010-90811 Controller Module
Brand: AMAT Applied Materials
Model:0010-90811
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT Applied Materials 0010-90811 Controller Module
Product manual:
Product Overview
The AMAT 0010-90811 controller module is a key component in Applied Materials semiconductor manufacturing equipment, mainly used for gas supply and process control systems. This module ensures that the chamber environment meets process requirements through precise adjustment of gas flow rate, pressure, and valve status. It is widely used in core processes such as etching, deposition, and ion implantation, playing an important role in ensuring consistency and high yield in semiconductor manufacturing.
Technical parameters (inferential information, specific values may vary slightly due to undisclosed information)
Function type: Gas controller module
Control object: Process gases (such as BF ∝, high-purity process gases, etc.)
Input power supply: usually low voltage DC power supply (24V DC is common)
Signal interface: supports communication with the upper system controller (PLC or AMAT dedicated main control system)
Monitoring function: pressure, valve status, flow feedback
Control mode: closed-loop control, supporting fast response and high-precision adjustment
Design features: resistant to high-purity gas corrosion, adaptable to clean room vacuum process environment
Application scenarios
Semiconductor process gas supply
Accurately adjust the process gas flow rate for CVD, PVD, etching, ion implantation and other processes.
Vacuum chamber environment control
Adjust the gas pressure and proportion in the vacuum process chamber to ensure the stable operation of the process.
Security and protection
Provide gas status monitoring (flow rate, pressure, valve position) and trigger protective measures in case of abnormal situations.
Process accuracy and consistency
Implement closed-loop feedback, maintain stable gas parameters, and ensure consistent wafer processing quality.
AMAT Applied Materials 0010-90811 Product details picture:
0010-90811
AMAT Applied Materials 0010-90811 product video
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