AMAT Applied Materials 0010-99060 Gas Panel

Product manual:

Product Overview

AMAT Applied Materials 0010-99060 gas panel is a core gas control module used in semiconductor manufacturing equipment. It is responsible for safely and accurately delivering process gases to the process chamber or reaction zone, and monitoring gas flow rate, pressure, and mixing ratio. This gas panel is widely used in etching, deposition (CVD/PVD), ion implantation and other process steps, and is a key component to ensure process stability and product consistency.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product Type: Gas Control Panel

Main functions:

Accurately control gas flow rate, pressure, and mixing ratio

Monitor gas status and provide safety alarms

Support process parameter interface, connect control system for automated management

Interface types: gas pipeline interface, electronic signal interface (connected to control system)

Gas compatibility: Suitable for various process gases (such as N ₂, Ar, O ₂, Cl ₂, etc.)

Mechanical characteristics: Industrial grade panel design, easy to install and maintain

Safety features: overvoltage protection, leakage detection, and emergency shutdown function

Application scenarios

Semiconductor process gas control: achieving precise gas management in processes such as etching, deposition, and ion implantation.

Stable process parameters: Ensure stable gas flow rate and mixing ratio, improve process repeatability and product yield.

Equipment security protection: Through real-time monitoring and alarm functions, prevent gas leaks or abnormal pressure.

System integration: Collaborate with the host, I/O modules, relay modules, gas sensors, etc. to achieve an automated gas control system.

Product advantages

Precise control: high-precision flow and pressure regulation to ensure process stability.

Safe and reliable: equipped with overvoltage protection, leakage detection, and emergency shutdown functions.

Modular design: easy to install, replace, and maintain, reducing downtime.

Good compatibility: Deeply compatible with the AMAT system control module to achieve automated process control.

AMAT Applied Materials 0010-99060 Product details picture:

0010-99060

AMAT Applied Materials 0010-99060 product video

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