AMAT Applied Materials 0021-96788 Pneumatic Module

Product manual:

AMAT Applied Materials 0021-96788 Pneumatic Module
Product Overview

0021-96788 is a pneumatic module in AMAT semiconductor equipment, used to control pneumatic actuators such as valves, cylinders, and vacuum pumps inside the equipment. This module achieves automation and high reliability operation of various mechanical actions in semiconductor process equipment by precisely controlling air pressure and airflow.

Technical functions and features

Pneumatic control

Provide stable air pressure output to drive pneumatic valves, cylinders, and other actuators.

Support precise adjustment of airflow and response time to meet high-precision process requirements.

Multi-channel Design

Multiple pneumatic actuators can be controlled simultaneously to achieve complex process action sequences.

Support modular combination for easy expansion or customization of pneumatic control solutions.

Security and protection

Built in overvoltage protection and leak proof design ensure equipment and wafer safety.

It can be linked with the device controller and interlock system to automatically cut off gas or stop operation in case of abnormal conditions.

Modular structure

Easy to disassemble, maintain, and replace, reducing downtime.

Designed to comply with semiconductor cleanroom standards, dust-proof and pollution proof.

Application field

Gas valve control

Control the flow rate of reaction gas and carrier gas in CVD, PVD, ALD and other equipment.

Accurately control gas switching and ratio to ensure process stability.

Wafer Handling and Loadlock System

Control the movement of elevators, pneumatic manipulators, and cabin doors to achieve automated wafer handling.

Vacuum and exhaust system

Adjust the inlet valve of the vacuum pump to ensure precise control of chamber pressure.

Control the exhaust emission valve to ensure emission safety.

Automated process equipment

Cooperate with the controller to achieve automation of equipment pneumatic actions, improve process repeatability and production efficiency.

AMAT Applied Materials 0021-96788 Product details picture:

0021-96788

AMAT Applied Materials 0021-96788 product video

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