AMAT Applied Materials 0040-20100-01 Heater Base Plate

Brand: AMAT Applied Materials
Model:0040-20100-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0040-20100-01 Heater Base Plate

Product manual:

Product Overview

The AMAT 0040-2010000-01 heater base plate is a key support and heat dissipation component in Applied Materials semiconductor process equipment. It is commonly used for the installation and fixation of heater modules, while providing stable heat conduction and electrical isolation. The bottom plate ensures that the heater can safely and uniformly transfer heat in the process chamber or related devices, thereby ensuring the temperature accuracy and consistency of deposition, etching, or diffusion processes.

Technical parameters (inference and industry norms)

Type: Heater Base Plate/Mounting Plate

Function: Mechanical support, thermal conduction, electronic isolation

Material: High temperature corrosion-resistant metal or ceramic composite material

Size and Installation: Designed according to the device model, compatible with specific heater modules

Temperature resistance performance: able to withstand the working temperature range of the heater, ensuring stability

Working environment: semiconductor clean room, resistant to vacuum or low pressure environment

Compatible devices: Applied Materials multi class deposition, etching, or heat treatment equipment

Application scenarios

Heater module support

Fix the heater component to ensure its stable position in the process chamber.

Heat conduction and homogenization