AMAT Applied Materials 0041-78374 RF Matching Component

Product manual:

1、 Product Overview

AMAT Applied Materials 0041-78374 RF Matching Component is a key RF module used in semiconductor process equipment, mainly used for impedance matching between RF power supply and plasma load.

2、 Technical parameters (speculated and organized)

Functional positioning: RF impedance matching component, adapted to changes in cavity load

Operating frequency: Typically supports 13.56 MHz and can support multi frequency RF systems

Power Range: Suitable for RF power transmission ranging from several hundred watts to several kilowatts

Control mode: can be automatically matched or controlled through the main control system

Interface: RF coaxial connector, control signal interface connected to the main control system or matching control board

Cooling method: air-cooled or water-cooled (depending on the version) to ensure long-term stable operation

Version revision: There are different revisions (such as Rev A/B) with slight differences in interface, control, or power capabilities

3、 Application scenarios

Plasma etching system: matching chamber load to improve etching rate and uniformity

Chemical vapor deposition (CVD)/atomic layer deposition (ALD): ensuring plasma stability during the deposition process

Ion implantation and ashing process: providing stable power for process modules that require RF discharge

AMAT machine RF system: works in conjunction with RF power supply, control module, and cavity system

4、 Product advantages

Efficient energy transmission: automatically matching impedance, reducing reflected power, and improving RF power utilization efficiency

High stability: ensuring long-term stable operation of the cavity plasma and improving process consistency

Modular design: independent components for easy maintenance and replacement, reducing equipment downtime

Strong process adaptability: specially designed for AMAT process chambers, with a wide matching range and adaptability to various process conditions

Protection function: Equipped with overvoltage, overcurrent, and high reflection power protection, extending the service life of the equipment

AMAT Applied Materials 0041-78374 Product details picture:

0041-78374

AMAT Applied Materials 0041-78374 product video

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