AMAT Applied Materials 0090-77327 Electronic Flow Meter

Product manual:

Product Overview

AMAT 0090-77327 is an electronic flow meter (MFM) used in Applied Materials semiconductor equipment.
This flowmeter is mainly used for precise measurement and monitoring of process gas flow,

Technical parameters (inferred properties)

Type: Electronic Mass Flow Meter (MFM).

Measurement medium: Process gases (such as argon, nitrogen, oxygen, hydrogen, etc.).

Flow range: Depending on the device model, it can cover low flow to medium high flow process requirements.

Output signal: Analog signal (such as 0-5V, 0-10V, or 4-20mA) or digital signal interface (such as TTL, RS-485).

Accuracy: High precision measurement ensures stable process gas flow and good repeatability.

Interface type: standard flange or threaded interface, suitable for gas pipeline installation.

Features: Fast response, strong anti vibration and anti-interference ability, suitable for semiconductor cleanroom environment.

Application scenarios

Process gas flow monitoring

Real time measurement of gas flow during deposition, etching, cleaning, or detection processes to ensure accurate proportioning.

Closed loop gas flow control

Cooperate with a Mass Flow Controller (MFC) or controller to achieve closed-loop control of automatic gas flow regulation.

Process stability guarantee

Accurate flow data is used to control process parameters such as pressure, gas concentration, and reaction rate to ensure product consistency.

Equipment maintenance and fault diagnosis

Provide alarm signals when there is abnormal flow, and support quick troubleshooting of gas or sensor problems.

Product advantages

High precision measurement: ensuring precise control of process gas flow rate.

Quick response: Adapt to high-speed processes and dynamic flow changes.

Strong anti-interference ability: maintain stable measurement in electromagnetic and vibration environments.

Durable cleanroom environment: The materials and design are suitable for semiconductor process cleanliness standards.

Modular maintenance is convenient: it can be quickly installed, replaced, or upgraded.

Good compatibility: designed specifically for AMAT series devices, seamlessly matching with controllers and pneumatic systems.

AMAT Applied Materials 0090-77327  Product details picture:

0090-77327

AMAT Applied Materials 0090-77327  product video

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