AMAT Applied Materials 0090-90140 Controller Module

Brand: AMAT Applied Materials
Model:0090-90140
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0090-90140 Controller Module

Product manual:

Product application areas

Semiconductor process equipment vacuum system

Vacuum process equipment used for AMAT (such as CVD, PVD, Etch, etc.), mainly responsible for pumping, valves, and pressure regulation of the vacuum chamber.

Ensure a stable vacuum environment is maintained inside the process chamber to meet the requirements of thin film deposition, etching, ion implantation, and other processes.

Vacuum pump and gas flow control

Control the start stop and operation parameters of equipment such as dry pumps and turbo molecular pumps.

Coordinate the opening and closing of Mass Flow Controllers (MFCs) and valves to achieve precise management of gas input and discharge.

Equipment safety and interlock protection

Provide automated vacuum control logic during equipment startup, shutdown, and maintenance modes.

Data collection and system communication

Transfer the operating data of the vacuum system (pressure value, valve status, pump speed) to the main control computer.

Communicate with the central control system of AMAT equipment to achieve multi module linkage.