AMAT Applied Materials 0100-00046 Current Sensing Components

Brand: AMAT Applied Materials
Model:0100-00046
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-00046 Current Sensing Components

Product manual:

1、 Product Overview

AMAT Applied Materials 0100-00046 current sensing component is a key module used in semiconductor process equipment power supply and control systems, for real-time monitoring of current signals and feedback to control units. This component can detect the current status of RF power supply, vacuum pump, actuator or other critical subsystems, thereby achieving closed-loop control, fault protection and process parameter monitoring.

2、 Technical parameters (speculated and organized)

Functional positioning: Current detection and signal feedback

Measurement range: can cover typical power current in the equipment (specific values vary depending on the model)

Output signal: Analog voltage signal or digital signal feedback to the main control system

Interface form: onboard interface or connection harness output to controller

Protection function: equipped with overcurrent and short circuit detection functions to ensure equipment safety

Installation method: Modular design, can be installed near the chassis, control chassis or power module

Environmental adaptability: Industrial grade design, suitable for high temperature, clean room, and electromagnetic interference environments of semiconductor equipment

Version revision: There may be different versions (such as Rev A/B) with slight differences in measurement accuracy or interface methods

3、 Application scenarios

RF power monitoring: detecting RF matching devices, power output, or load current to achieve closed-loop regulation

Vacuum/pump system: monitoring vacuum pump current, protecting equipment, and determining working status

Liquid/gas supply system: used for monitoring the driving current of pumps and valves, and assisting in the safe operation of processes

Process monitoring and protection: Provide real-time current data to the main control system for alarm, shutdown, or optimized control