AMAT Applied Materials 0100-09110 Filter Plate

Product manual:

Product Overview

AMAT 0100-09110 is a filter plate used in Applied Materials semiconductor equipment.
This component is mainly used to filter gas or liquid particle impurities inside the equipment, protect the process environment and critical components, and ensure that the cleanliness requirements are met in the semiconductor manufacturing process. The filter plate is a critical component in gas supply systems, vacuum chambers, or liquid circulation systems.

Technical parameters (inferred properties)

Type: Filter Plate.

Function:

Remove particles, impurities, and pollutants from gas or liquid flow.

Provide stable flow channels to ensure stable airflow or liquid flow during the equipment process.

Material: Corrosion resistant, high cleanliness material (such as stainless steel, polytetrafluoroethylene, or filter material composite structure).

Applicable environment: semiconductor clean room and high-purity process environment.

Installation location: filter slot of gas supply pipeline, vacuum chamber or liquid circulation system.

Features: High filtration accuracy, low pressure drop, easy disassembly and replacement, ensuring long-term stable operation.

Application scenarios

Process gas filtration

Remove particles from gases during deposition, etching, or cleaning processes to prevent wafer contamination.

Liquid circulation system filtration

Remove impurities in the liquid chemical supply system to ensure process stability and product quality.

equipment protection

The filter plate protects downstream sensors, valves, pumps, and control modules from particle damage.

Maintenance and replacement

Modular design facilitates quick disassembly and supports regular replacement to maintain filtering effectiveness.

Product advantages

High filtration accuracy: ensuring the purity of gas or liquid fluids and protecting process quality.

Low pressure drop: reduces fluid resistance and ensures stable flow of the system.

Corrosion resistant and clean resistant: Suitable for semiconductor cleanroom environments and chemical media.

Modular maintenance is convenient: easy to disassemble and replace, reducing downtime.

Good compatibility: designed specifically for AMAT series equipment, compatible with gas or liquid supply systems.

AMAT Applied Materials 0100-09110  Product details picture:

0100-09110

AMAT Applied Materials 0100-09110  product video

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