AMAT Applied Materials 0100-09307 Relay Module

Product manual:

AMAT 0100-09307 Relay Module
Product Overview

AMAT 0100-09307 is a relay/interlock circuit board module in Applied Materials semiconductor equipment, mainly used for safety control and circuit switching. It achieves electrical control and protection of equipment subsystems by integrating relays and interlock logic circuits.

Technical characteristics (inferred general features)

Function type: Relay driven+Interlock logic

Application objects: power supply, vacuum pump, gas valve, fan, electromagnetic actuator and other subsystems

Control form: Supports switching between normally open/normally closed contacts

Security attribute: equipped with interlocking function to prevent accidental operation under unsafe conditions

Electrical performance: Designed to meet the high reliability, long lifespan, and low interference requirements of semiconductor equipment

Application scenarios

Semiconductor manufacturing equipment

Used for etching machines CVD、PVD、 Electrical control circuits for process equipment such as cleaning machines

Ensure safe switching of subsystems such as process gas, vacuum, and RF power supply

Interlocking and Security Protection

Implement interlocking logic for equipment door locks, chamber covers, gas panels, etc

Automatically cut off power in abnormal or dangerous conditions to protect personnel and equipment safety

Power supply and actuator control

Control the start and stop of peripheral devices such as vacuum pumps, cooling systems, gas valves, fans, etc

As a logical permission signal module, ensure the correct sequence of actions

Equipment diagnosis and maintenance

Assist engineers in diagnosing the health status of circuits through relay status feedback

In preventive maintenance, as a replaceable unit, quickly restore equipment operation

Product advantages

High reliability: meets the long-term continuous operation requirements of semiconductor production lines

Safety interlock: prevent equipment misoperation under abnormal process conditions

Modular design: easy to replace and maintain, reducing downtime

Electrical isolation: By isolating control and execution circuits through relays, system stability is improved

AMAT Applied Materials 0100-09307 Product details picture:

0100-09307

AMAT Applied Materials 0100-09307 product video

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