AMAT Applied Materials 0100-35057 Gas Panel

Brand: AMAT Applied Materials
Model:0100-35057
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

0100-35057

AMAT Applied Materials 0100-35057 Gas Panel

Product manual:

Product Overview

AMAT 0100-35057 gas panel is a core module used for gas management in Applied Materials semiconductor equipment. It is responsible for distributing process gases from the gas source to various process modules of the equipment, and adjusting gas flow rate, pressure, and mixing ratio to ensure stable and accurate gas supply during deposition (CVD/PVD), etching (Etch), and other processes. Gas panel is an important component of semiconductor process safety, stable operation, and repeatability control.

Technical parameters (typical features)

Type: Gas Panel

Function: Gas distribution, flow regulation, pressure control, mixing management

Interface type: Multi channel gas input/output interface, compatible with various process modules

Control method: It can be combined with a flow controller or controller to achieve digital or analog closed-loop control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable gases: process gases (such as N ₂, Ar, H ₂, SiH ₄, etc.)

Compatible devices: Various deposition, etching, and heat treatment equipment from Applied Materials

Application scenarios

Process gas distribution and control

Distribute the gas supplied by the gas source to deposition, etching, or other process modules, and adjust the flow rate and pressure.

Gas mixing management