AMAT Applied Materials 0100-35207 Host Interlocking Module

Brand: AMAT Applied Materials
Model:0100-35207
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-35207 Host Interlocking Module

Product manual:

AMAT Applied Materials 0100-35207 Host Interlocking Module
Product Overview

0100-35207 is the Host Interlock Module in AMAT semiconductor equipment, used to achieve secure interlocking between various process modules, actuators, and control systems of the equipment. It triggers protective measures in abnormal or dangerous situations by monitoring equipment status and process conditions, ensuring the safe operation of wafers, process modules, and equipment.

Technical functions and features

Security interlock control

Monitor the status of each module of the equipment, such as temperature, pressure, power supply, and mechanical position.

Automatically trigger shutdown, alarm or switching operations under abnormal conditions to prevent process and equipment damage.

Multi module collaboration

It can cooperate with controllers, servo modules, pneumatic modules, water valve components, and power modules to achieve overall safety protection of the equipment.

Support safety logic control for complex process sequences.

Real time monitoring and response

Quickly detect key parameter anomalies, respond in real-time, and execute interlocking actions.

Provide status signal feedback to the main controller to achieve dual protection of process and safety.

Modular and easy to maintain

Compact design, easy to install, disassemble, and replace.

Support long-term operation and maintenance in semiconductor cleanroom environments.

Application field

Safety protection of semiconductor process equipment

Implement status monitoring and safety interlock for process modules such as sedimentation, etching, and cleaning.

Wafer handling system

Ensure the safe shutdown of Loadlock elevators, robotic arms, and pneumatic modules in case of abnormal conditions.

Key module protection of equipment

Coordinate the cold plate components, water valve components, power module, and servo module to prevent overheating, overpressure, or fluid abnormalities.

Automated production line safety integration

Collaborate with the main controller and gauge module to achieve overall equipment safety management and remote monitoring.