AMAT Applied Materials 0100-35394 Interface Module

Brand: AMAT Applied Materials
Model:0100-35394
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-35394 Interface Module

Product manual:

Product Overview

AMAT 0100-35394 Interface Module, also known as PCB CHAMBER T/C INTERFACE, is a critical signal interface board in semiconductor equipment. It is mainly responsible for the acquisition, processing, and transmission of temperature sensor (Thermocouple, T/C) signals,

Technical Features

Temperature sensor interface: Provides multiple channel interfaces and supports multi-point temperature monitoring.

Strong signal processing capability: able to filter, amplify, and calibrate temperature signals to ensure data stability.

Compatibility: Fully compatible with DPS METCH and CENTURA systems, easy to replace and maintain.

High reliability: Designed with high-quality PCB boards and electronic components, suitable for electromagnetic interference and high temperature conditions in semiconductor process environments.

Compact structure: The board design is compact, making it easy to install in equipment chambers or control boxes.

Scalability: Supports multiple temperature sensor interfaces, allowing for flexible expansion of monitoring points to meet different process requirements.

Application field

DPS METCH system

Used for temperature monitoring and control of cavities and target materials in etching processes.

Ensure temperature uniformity and process repeatability during the etching process.

CENTURA system

Used for temperature control in deposition processes, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD).

Support multi-point temperature collection to improve process accuracy and stability.

Temperature control system for semiconductor manufacturing equipment

Used for temperature monitoring and signal interface of various semiconductor devices.

High precision process temperature control is crucial and can be combined with the main control board to achieve real-time feedback.