AMAT Applied Materials 0100-71047 Main Frame Interlocking Module

Brand: AMAT Applied Materials
Model:0100-71047
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-71047 Main Frame Interlocking Module

Product manual:

1、 Product Overview

The AMAT Applied Materials 0100-71047 main framework interlock module is a safety control module used for semiconductor process equipment. It is mainly used for interlocking management of the main control framework, ensuring the safe operation of equipment in operation, maintenance, or fault situations by monitoring and controlling the safety status. This module is responsible for centralized management of electrical, logical, and mechanical interlocks in AMAT equipment, and is a key component for the safe operation of the equipment.

2、 Technical parameters (speculated and organized)

Functional positioning: Main framework security interlock monitoring and control

Interface type: Digital input/output interface, used to connect with safety switches, door locks, emergency stop buttons, and other interlocking signals

Logic control: Built in security logic judgment, realizing multi-channel interlocking state management

Installation method: Modular insertion into the main control frame or control chassis

Power requirements: Typical industrial power supply (+5V,+12V or backplane power supply)

Signal protection: equipped with overcurrent, short circuit, and signal filtering protection to improve system reliability

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanroom environment

Version revision: There may be different versions (Rev A/B, etc.) with differences in the number of interfaces or logical functions

3、 Application scenarios

Equipment safety management: Monitor the status of machine doors, panels, and subsystems to achieve operational safety

Interlock control: prevents dangerous actions during maintenance, repair, or malfunction, protecting equipment and operators

Process protection: Ensure that important modules only operate in a safe state during the process

Integration of main control framework: works in conjunction with I/O modules, controllers, and other security modules