AMAT Applied Materials 0100-90271 wafer loader interlock module

Brand: AMAT Applied Materials
Model:0100-90271
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-90271 wafer loader interlock module

Product manual:

1、 Product Overview

The AMAT 0100-90271 wafer loader interlock module is a key module used for safe control of wafer handling systems in semiconductor equipment.
It is mainly used in wafer loader systems to interlock and monitor the mechanical actions of equipment, ensuring the safety of equipment and operators during wafer loading and unloading processes.

This module achieves logical judgment and interlocking control of wafer loading actions by inputting signals from access control, sensors, and mechanical position switches, preventing accidental operations or equipment conflicts.

2、 Product Features

Safety interlock control

Control the action of the wafer loader through logical judgment to avoid mechanical conflicts or misoperations;

Support multi-point safety signal input (such as door status, photoelectric sensors, limit switches).

High reliability industrial design

Adopting industrial grade electronic components to adapt to high cleanliness, vibration, and electromagnetic interference conditions in semiconductor manufacturing environments;

The internal design considers the stability of long-term continuous operation.

Multi channel signal management

Supports multiple input and output signals, and can simultaneously monitor multiple interlocking conditions;

The output signal can control the main controller or actuators (such as solenoid valves, drivers, etc.).

modular design

Plug in or rack mounted installation, convenient for maintenance and replacement;

Equipped with status indicator lights for easy fault diagnosis and operational status confirmation.

Strong compatibility

Compatible with AMAT series wafer loader control system, main controller, and interface module;

Can be used as a standard replacement for system safety interlock modules.