AMAT Applied Materials 0100-90468 Charging Voltage PCB Card

Product manual:

AMAT Applied Materials 0100-90468 Charging Voltage PCB Card
Product Overview

0100-90468 is a Charge Voltage PCB Card in AMAT semiconductor equipment. It is mainly used to provide, regulate, and monitor the charging voltage required during the process, as an interface circuit board between the equipment power supply and the process module. This board plays a critical role in plasma technology, electrostatic chuck (ESC) control, ion source, and RF power supply auxiliary modules.

Technical functions and features

Voltage generation and regulation

Provide stable DC or pulse charging voltage.

Wide voltage range, supporting the adjustment of low-voltage control signals to high-voltage process power supply.

Electrostatic Chuck (ESC) power supply

Provide ESC with the required DC bias voltage for adsorbing wafers to ensure stable fixation of the wafers during the process.

Cooperate with temperature control and interlock modules to ensure wafer safety.

Plasma assisted process

Provide bias voltage in the cavity to regulate ion bombardment energy.

Promote thin film deposition, etching rate, and uniformity control.

Signal detection and feedback

Real time monitoring of output voltage, current, and other parameters.

Feedback the signal to the main control system to form a closed-loop control.

safety protection

Built in overvoltage and overcurrent protection circuits.

In case of abnormalities, the output can be quickly cut off to protect the wafer and equipment.

Application field

CVD (Chemical Vapor Deposition) equipment

Used for stabilizing wafer fixation, ensuring uniformity and repeatability of thin film deposition.

PVD (Physical Vapor Deposition) equipment

By adjusting the ion energy through charging voltage, the density and adhesion of the film can be improved.

Etching equipment

Control wafer surface bias, accurately adjust etching rate and selectivity.

Electrostatic Chuck Control System

Provide ESC adsorption voltage to ensure that the wafer does not shift in position in a vacuum environment.

AMAT Applied Materials 0100-90468 Product details picture:

0100-90468

AMAT Applied Materials 0100-90468 product video

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