AMAT Applied Materials 0100-90855 Rotating/Scanning Interlock Board

Product manual:

Product Overview

AMAT 0100-90855 Rotating/Scanning Interlock Board is a safety and control module in Applied Materials semiconductor equipment,
Used to manage the action interlocking of rotating components or scanning systems in equipment.
This module ensures safe interlocking during equipment operation or process operation by monitoring the status of rotating or scanning devices,
Prevent equipment damage or process abnormalities. It is an important component of the automated operation and operational safety of semiconductor equipment.

Technical parameters (typical features)

Type: Rotation/Scan Interlock Board

Function: Monitor the rotation or scanning system status and provide safety interlock signals

Input signal: feedback on the position, speed, or status of the rotating or scanning device

Output signal: Interlocking control signal, transmitted to the controller or safety system

Interface type: Digital input/output interface, connected to the main controller or operation panel

Work environment: cleanroom compatible, high temperature resistant, vibration resistant

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation, and scanning related process equipment

Application scenarios

Interlocking of rotating components

Monitor the wafer or process board rotation device to ensure safe operation and prevent abnormal movements.

Scanning system security control

Monitor the status of the scanning mechanism and achieve operational safety interlock.

Process protection

Automatically trigger interlocking signals when rotating or scanning equipment is abnormal to prevent process or equipment damage.

Equipment maintenance and replacement

Modular design facilitates disassembly and replacement, reducing downtime.

Product advantages

High safety: Automatic interlocking protection is achieved by monitoring the status of rotating or scanning devices.

Strong reliability: resistant to high temperatures, vibration, and suitable for semiconductor production environments.

Modular design: easy to install, disassemble, and replace, improving maintenance efficiency.

Wide compatibility: can be used in conjunction with various AMAT control systems and rotation/scanning subsystems.

Process stability assurance: Ensure that the rotating or scanning process operates in a safe state, improving process consistency.

AMAT Applied Materials 0100-90855 Product details picture:

0100-90855

AMAT Applied Materials 0100-90855 product video

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