AMAT Applied Materials 0100-90881 Gas Panel Analysis

Brand: AMAT Applied Materials
Model:0100-90881
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-90881 Gas Panel Analysis

Product manual:

AMAT Applied Materials 0100-90881 Gas Panel
1、 Product Overview

AMAT 0100-90881 is a gas control and distribution module used by Applied Materials for semiconductor equipment.
Its main function is to precisely control the flow rate, pressure, and mixing ratio of process gases, providing a stable gas environment for plasma processes such as PVD, CVD, and Etch.

This gas panel is commonly used in Endura, Centura, Producer, P5000 series equipment, and can integrate multiple gas channels to support high-precision process control and safety management.

2、 Product Features

Gas flow control

Accurately adjust the gas flow rate to ensure the required concentration and uniformity of the reaction gas for the process.

Support low to high flow range to meet different process requirements.

Pressure and safety monitoring

Real time monitoring of gas pressure to prevent overpressure or leakage.

Built in safety valve and pressure sensor for automatic safety protection.

Gas mixing and switching

Can control the mixing ratio of multiple gases and support complex process gas ratios.

Quickly switch gas channels to adapt to different process steps.

Integration with equipment control system

Interact with the main control board or PLC through communication interfaces to achieve remote monitoring and automatic adjustment.