AMAT Applied Materials 0100-99007 Controller Module

Brand: AMAT Applied Materials
Model:0100-99007
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0100-99007 Controller Module

Product manual:

AMAT 0100-99007 Controller Module
Product Overview

The AMAT 0100-99007 controller module is a critical control unit in Applied Materials semiconductor process equipment. This module centrally manages and schedules process gases, vacuum systems, power units,

Technical parameters (inferred general characteristics)

Control function: Supports multiple signal inputs and outputs, with data acquisition, logical judgment, and real-time control capabilities

Interface format: analog, digital, and bus communication interface (used for interaction with modules such as MFC, vacuum pump, power supply, etc.)

Processing performance: Built in embedded processor or FPGA circuit, ensuring millisecond level response time

Electrical characteristics: The working voltage is usually low voltage direct current (+24VDC), with overvoltage, overcurrent, and short-circuit protection

Environmental requirements: Meet the conditions for use in semiconductor cleanrooms, with resistance to electromagnetic interference and long-term operational stability

Application scenarios

Core control of semiconductor process equipment

Used for etching (Etch), deposition (CVD, PVD, ALD), cleaning, ion implantation and other equipment

Coordinate and manage core processes such as gas supply, vacuum control, RF power on/off, temperature regulation, etc

Equipment safety and interlock control

Collaborate with interlocking modules such as door locks, vacuum chambers, gas panels, etc

Prevent dangerous operations from being carried out under unsafe conditions and ensure the safety of equipment and personnel

Process precision control

Real time monitoring and adjustment of key parameters such as process gas flow rate, pressure, temperature, etc

Improve process repeatability and yield

Data Collection and Diagnosis

Collect operational data and transmit it to the upper computer or equipment control system