AMAT Applied Materials 0100-A0019 RF Matching Detector

Product manual:

AMAT Applied Materials 0100-A0019 RF Matching Detector
1、 Product Overview

AMAT 0100-A0019 is a radio frequency (RF) matching detector used by Applied Materials for semiconductor devices.
The main function of this module is to monitor the impedance matching status between the RF generator and the process chamber

RF matching detectors are typically used in conjunction with RF generators (such as 0090-01419) and matching networks

2、 Product Features

Impedance matching monitoring

Real time detection of cavity load impedance and matching network status.

Determine whether the transmission power matches the cavity load to avoid energy reflection.

Reflection power detection

Measure RF reflection power to prevent RF energy from flowing back into the generator and protect the equipment.

Output signals to the control system to achieve automatic matching or alarm triggering.

Process optimization

Provide matching status feedback to assist in automatic adjustment of RF generators and matching networks.

Ensure plasma stability, improve process consistency and productivity.

Security protection function

Built in overvoltage and overcurrent detection interfaces.

Trigger the protection mechanism when the reflected power is too high or the matching is abnormal to prevent equipment damage.

3、 Product Features

High precision RF detection

Accurately measure RF power, voltage, current, and reflected power to ensure matching monitoring accuracy.

Rapid response capability

Response time less than 1 ms, real-time monitoring of RF matching status, suitable for fast process switching requirements.

modular design

It can be directly integrated into AMAT control cabinets or matching network systems for easy maintenance and replacement.

Industrial grade reliability

Adopting high temperature resistant and high-frequency components to adapt to the semiconductor process environment.

Anti vibration, anti electromagnetic interference, supporting 24/7 long-term operation.

Rich signal output interfaces

Provide analog or digital output interfaces that can directly communicate with the control system.

Support remote monitoring and data recording functions.

AMAT Applied Materials 0100-A0019 Product details picture:

0100-A0019

AMAT Applied Materials 0100-A0019 product video

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