AMAT Applied Materials 0120-90146 Gauge Controller Module

Product manual:

AMAT Applied Materials 0120-90146 Gauge Controller Module
Product Overview

0120-90146 is the Gauge Controller Module in AMAT semiconductor equipment, mainly used to manage pressure, vacuum, or gas flow sensors (Gauge) inside the equipment, and to monitor and control the process chamber and gas path system in real time.

Technical functions and features

Real time sensor management

Monitor data from key measuring devices such as pressure sensors, vacuum sensors, and flow meters.

Provide high-precision readings to ensure stable pressure and gas flow in the process chamber.

Closed loop control capability

Feedback sensor data to the main controller to achieve automatic adjustment of pressure or flow rate.

Support multi-channel data acquisition and control to meet complex process requirements.

Interface and Communication Capability

It can seamlessly connect with AMAT controllers, pneumatic modules, pump systems, and power modules.

Support data upload and remote monitoring to achieve automated production line integration.

Security and protection functions

Built in abnormal alarm and interlock logic, triggering protective measures when the measured value exceeds the safe range.

Prevent abnormal chamber pressure or loss of control of the gas path, ensuring the safety of wafers and equipment.

modular design

It can be quickly installed, disassembled, and replaced, making it easy to maintain and upgrade the equipment.

Designed to adapt to semiconductor cleanroom environments and support long-term continuous operation.

Application field

CVD/PVD deposition equipment

Real time monitoring of chamber pressure and gas flow rate to ensure uniform film deposition and process stability.

Etching equipment

Control the plasma chamber pressure to ensure that the etching rate and selectivity meet the process requirements.

Cleaning and pneumatic system

Monitor the flow rate of chemical liquids or reaction gases to achieve precise process control.

Semiconductor automation production line

Collaborate with Loadlock, pneumatic modules, and elevators to achieve pressure monitoring and safety assurance during wafer handling.

AMAT Applied Materials 0120-90146 Product details picture:

E19321290

AMAT Applied Materials 0120-90146 product video

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