AMAT Applied Materials 0150-30266 Dual RF Filter Module

Brand: AMAT Applied Materials
Model:0150-30266
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0150-30266 Dual RF Filter Module

Product manual:

Product Overview

AMAT Applied Materials 0150-30266 Dual RF Filter Module is an RF signal processing module used in semiconductor manufacturing equipment. Its main function is to filter and isolate RF signals, ensuring the purity of the output signal of the RF power source, while reducing the impact of interference on the process. This module typically collaborates with the RF matching navigator, RF generator interface module, and plasma arc control board to ensure stable operation of the plasma process.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product Type: Dual RF Filter Module

Main functions:

Filter and isolate RF signals

Ensure stable and pure RF power output signal

Communication with RF control system and process control board interface

Interface type: Modular RF interface, compatible with AMAT control system

Electrical characteristics:

Support high-frequency RF signal input and output

Anti interference design to improve signal purity

High reliability, adaptable to industrial environments

Mechanical characteristics: Industrial grade modular design, easy to install and maintain

Application scenarios

Plasma etching and deposition process: Filter the RF power signal to ensure the stability of the plasma arc.

RF signal isolation: prevents interference signals from affecting process uniformity and repeatability.

System integration: Collaborate with the RF matching navigator, RF interface module, and plasma arc current control board to form a complete RF closed-loop control system.

Equipment maintenance: Modular design facilitates replacement and upgrading, improving system reliability.