AMAT Applied Materials 0190-09764 thyristor power supply

Product manual:

Product Overview

AMAT 0190-09764 is a thyristor power supply module in Applied Materials semiconductor equipment.
This module is used to provide controllable and highly stable AC or DC power supply for internal loads of the device, such as heaters, ion sources, induction coils, or motor drivers. The output power is adjusted through thyristors to achieve precise process control.

Technical parameters (inferred properties)

Type: Thyristor/SCR Power Supply.

Function:

Provide adjustable voltage or current output to achieve load power regulation.

Cooperate with the controller to achieve closed-loop power control and improve process accuracy.

Support soft start and overload protection to ensure load safety.

Output type: AC or DC, adjustable power output (according to load requirements).

Interfaces: power input terminal, control signal interface (analog or digital), load output terminal.

Installation location: in the slot of the equipment power module or inside the control cabinet.

Features: High precision, fast response speed, strong anti-interference ability, suitable for semiconductor clean environment.

Application scenarios

Heating or power control

Provide controllable power for heaters, induction coils, or plasma sources to achieve temperature or process power regulation.

Motor or actuator drive

Provide controllable power supply to support stepper motors, servo motors, or other actuator actions.

closed loop control system

Cooperate with sensors and controllers to achieve precise closed-loop control of power, temperature, or current.

Equipment safety and protection

Support soft start, overcurrent, overvoltage, and short-circuit protection to reduce the risk of equipment damage.

Modular maintenance and replacement

Can be quickly disassembled and replaced, reducing equipment downtime.

Product advantages

High precision power regulation: ensuring the stability and consistency of semiconductor processes.

Quick response: Adapt to high-speed processes and real-time power control requirements.

Strong anti-interference ability: maintains stable output in machines with complex electromagnetic environments.

AMAT Applied Materials 0190-09764 Product details picture:

M3399X

AMAT Applied Materials 0190-09764 product video

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