AMAT Applied Materials 0190-14783 RF Matching Box

Product manual:

Product Overview

AMAT 0190-14783 RF Matching Box is a key module used for RF power transmission and impedance matching in Applied Materials semiconductor equipment. It is used to adjust the impedance matching between the RF power supply and the process chamber, ensuring efficient transmission of RF energy to the process area, thereby achieving uniformity and stability in plasma deposition, etching, or cleaning processes. The RF matching box is an important component to ensure high-precision process effects and reliable equipment operation.

Technical parameters (typical features)

Type: RF Match Box/RF Match Box

Function: RF impedance matching, optimizing power transmission, protecting RF power supply

Operating frequency: usually ranging from tens of MHz to hundreds of MHz (depending on process requirements)

Maximum power: Designed according to device specifications, capable of withstanding high RF power output

Interface type: RF input/output interface, connected to RF power supply and process chamber

Control mode: manual or automatic matching, can achieve closed-loop adjustment with the controller

Work environment: cleanroom compatible, high temperature resistant, and resistant to electromagnetic interference

Compatible devices: Various plasma deposition (CVD/PVD) and etching (Etch) equipment from Applied Materials

Application scenarios

RF power transmission optimization

Adjust the impedance matching between the RF source and the process chamber to reduce reflected power and improve energy utilization efficiency.

Plasma deposition and etching

Ensure uniform and stable plasma, improve film deposition uniformity and etching accuracy.

equipment protection

Reduce the damage of RF reflection to RF power supply and extend the lifespan of equipment.

Closed loop control of process parameters

Cooperate with the controller to achieve automatic impedance matching, ensuring process repeatability and consistency.

AMAT Applied Materials 0190-14783 Product details picture:

0190-14783

AMAT Applied Materials 0190-14783 product video

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