AMAT Applied Materials 0190-16633 Magnet Driver

Product manual:

1、 Product Overview

AMAT 0190-16633 Magnet Driver Module is a high-precision power driver module used for magnetic field control systems in AMAT (Applied Materials) semiconductor equipment.

2、 Product Features

High precision magnetic field control

The output current has extremely high linearity and can achieve precise adjustment of magnetic field strength;

Support Constant Current Mode to ensure stable magnetic field without drift;

Suitable for multi area independent magnetic control configuration (upper magnetic field, lower magnetic field, circular magnetic field, etc.).

Low noise, low ripple output

Adopting efficient linear steady current circuit and filtering design, the magnetic field changes are extremely smooth;

The typical value of output current ripple is less than 0.5%, reducing plasma jitter.

Fast dynamic response

The internal control circuit has a high-speed feedback loop that can quickly respond to system magnetic field adjustment signals;

Improve the transient control performance of ion density and process rate within the cavity.

A comprehensive protection mechanism

Equipped with overcurrent (OCP), overvoltage (OVP), and over temperature (OTP) protection;

Support open/short circuit detection and automatic shutdown of magnetic coils;

Built in status indication and alarm output interface for easy monitoring by the main control system.

Modular structural design

Independent and pluggable modules, easy to install and replace;

Compatible with the AMAT main power architecture, facilitating system expansion and maintenance.

High reliability industrial grade design

Using high-voltage MOSFET or IGBT components, supporting long-term continuous output;

Internal heat conduction path optimization, with efficient air cooling or bottom plate heat dissipation structure;

Adapt to clean room and vacuum process environments.

Intelligent control and monitoring interface

Provide analog control signal interface (0-10V/4-20mA);

Real time feedback of output current, voltage, and temperature status signals;

It can achieve closed-loop regulation with the system main control or RF control unit.

AMAT Applied Materials 0190-16633 Product details picture:

0190-16633

AMAT Applied Materials 0190-16633 product video

More related products:

Lam 810-069751-11 Edge Detection Connection Board
Matrox 0P413G1GSFL/04 Controller Module
A-B 6181P-17A2MWX1DC display computer terminal

More product recommendations:

IS220YAICS1A analysis module
Nabtesco BTC-304 thruster
3BHE023784R1023 PPD113 B01-10-150000 Logic Controller Module