AMAT Applied Materials 0190-35252 Pneumatic Chamber Components

Brand: AMAT Applied Materials
Model:0190-35252
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT Applied Materials 0190-35252 Pneumatic Chamber Components

Product manual:

Product Overview

AMAT 0190-35252 Pneumatic Chamber Component is a key module used for pneumatic control in Applied Materials semiconductor equipment. This component is mainly used to manage and regulate the flow and pressure of gases in process equipment, providing a stable pneumatic environment for valves, actuators, and other pneumatic subsystems, ensuring the precise operation and safe operation of semiconductor process equipment. The pneumatic chamber component is the core interface connecting the gas source and the process module, ensuring the stability of the pneumatic system and the repeatability of the process of the equipment.

Technical parameters (typical features)

Type: Pneumatic Chamber Assembly

Function: Air pressure regulation, gas distribution, pneumatic control execution

Interface type: Gas input/output interface, compatible with multiple gas connections

Control method: Can be combined with solenoid valves or pneumatic actuators to achieve precise control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable equipment: Semiconductor process equipment such as Applied Materials CVD, PVD, Etch, Ion Implant, etc

Pressure range: Designed according to process requirements, supporting low-pressure to high-pressure pneumatic control

Application scenarios

Process gas flow and pressure control

Adjust the gas supply pressure and flow rate to ensure that the process module operates according to the set conditions.

Pneumatic valve and actuator drive